Fabrication engineering at the micro- and nanoscale /
by Campbell, Stephen A.,
Series: The Oxford series in electrical and computer engineering Edition statement:Fourth edition. Published by : Oxford University Press, (New York) Physical details: xiv, 671 pages 24 cm. ISBN:9780199861224 (pbk.). Year: 2012Item type | Current location | Call number | Copy number | Status | Date due | Barcode |
---|---|---|---|---|---|---|
Book | Shah Alam, Malaysia | 621.38152 CSF (Browse shelf) | C.1 | Available | 00010318 |
Includes bibliographical references and index.
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