Campbell, Stephen A., 1954-
Fabrication engineering at the micro- and nanoscale / Stephen A Campbell, University of Minnesota. - Fourth edition. - New York Oxford University Press, 2012 - xiv, 671 pages 24 cm. - The Oxford series in electrical and computer engineering .
Includes bibliographical references and index.
9780199861224 (pbk.)
2012037066
Semiconductors--Design and construction.
TK7871.85 / .C25 2013
621.38152 / CSF
Fabrication engineering at the micro- and nanoscale / Stephen A Campbell, University of Minnesota. - Fourth edition. - New York Oxford University Press, 2012 - xiv, 671 pages 24 cm. - The Oxford series in electrical and computer engineering .
Includes bibliographical references and index.
9780199861224 (pbk.)
2012037066
Semiconductors--Design and construction.
TK7871.85 / .C25 2013
621.38152 / CSF