Entry Topical Term

Number of records used in: 1

001 - CONTROL NUMBER

• control field: 7075

003 - CONTROL NUMBER IDENTIFIER

• control field: OSt

005 - DATE AND TIME OF LATEST TRANSACTION

• control field: 20150128083823.0

008 - FIXED-LENGTH DATA ELEMENTS

• fixed length control field: 150128|| aca||aabn | a|a d

040 ## - CATALOGING SOURCE

• Original cataloging agency: OSt
• Transcribing agency: OSt

150 ## - HEADING--TOPICAL TERM

• Topical term or geographic name as entry element: Semiconductors
• General subdivision: Design and construction.

670 ## - SOURCE DATA FOUND

• Source citation: Work cat.: (OSt)0: Campbell, Stephen A., 1954- 7074, Fabrication engineering at the micro- and nanoscale /